Dielectric ceramics for electrostatic chucks and method of...

Details Dielectric ceramics for electrostatic chucks and method of... Dielectric ceramics for electrostatic chucks and method of...

C - Chemistry, Metallurgy

04

B

31/190, 356/195

C04B 35/10 (2006.01) C04B 35/111 (2006.01) C04B 35/64 (2006.01) H01L 21/00 (2006.01) H01L 21/683 (2006.01)

Patent

CA 1336476

A dielectric ceramic for use in an electrostatic chuck, formed by firing in a reducing atmosphere a ceramic material mainly comprised of alumina, wherein said ceramic material comprises an alkaline earth metal in an amount of from 1.0 to 6.0 % by weight in terms of oxide and a transition metal in an amount of from 0.5 to 6.0 % by weight in terms of oxide. Also disclosed is a method of making a dielectric ceramic for use in an electrostatic chuck, comprising firing a ceramic material mainly comprised of alumina and containing from 1.0 to 6.0 % by weight of an alkaline earth metal in terms of oxide and from 1.0 to 6.0 % by weight of a transition metal in terms of oxide, in a reducing atmosphere while controlling the dew point of atmosphere gas.

597909

Affiliated with

Also associated with

Rating

Dielectric ceramics for electrostatic chucks and method of... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Dielectric ceramics for electrostatic chucks and method of..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Dielectric ceramics for electrostatic chucks and method of... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1169544