4. C - Chemistry, Metallurgy
  5. 04
  6. B

Tetsuo Kitabayashi

C - Chemistry – Metallurgy – 04 – B

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Country: Japan

Dielectric ceramics for electrostatic chucks and method of...

C - Chemistry – Metallurgy – 04 – B
Patent

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Electrostatic chuck

H - Electricity – 01 – L
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Method of and apparatus for applying voltage to...

H - Electricity – 05 – F
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Profile ID: LFCA-PAI-P-1074804

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