Digital micro-mirror device

G - Physics – 02 – B

Patent

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Details

G02B 26/08 (2006.01) B81B 7/04 (2006.01) G03B 21/28 (2006.01)

Patent

CA 2742310

A digital micro-mirror device comprising an array of micro-mirror assemblies positioned on a substrate. Each micro-mirror assembly comprises: a mirror spaced apart from the substrate; a stem supporting the mirror; and first and second electrodes positioned on either side of the stem. The stem is comprised of a resiliently flexible material, such that the mirror can tilt either towards the first electrode or towards the second electrode by an electrostatic force. The digital micro-mirror device may be used in data projectors and the like.

La présente invention concerne un dispositif à micromiroirs numérique comprenant un réseau d'ensembles micromiroirs positionnés sur un substrat. Chaque ensemble micromiroir comprend : un miroir éloigné du substrat ; une tige supportant le miroir ; et des première et seconde électrodes positionnées des deux côtés de la tige. La tige est composée d'un matériau souple élastiquement, de façon que le miroir puisse s'incliner soit vers la première électrode, soit vers la seconde électrode, par l'application d'une force électrostatique. Le dispositif de micromiroirs numérique peut être utilisé dans des projecteurs de données et analogues.

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