Distributor beam for chemical vapor deposition on glass

Details Distributor beam for chemical vapor deposition on glass Distributor beam for chemical vapor deposition on glass

C - Chemistry, Metallurgy

03

C

32/23

C03C 17/00 (2006.01) C03C 17/245 (2006.01) C23C 16/44 (2006.01) C23C 16/54 (2006.01)

Patent

CA 1293119

ABSTRACT A distributor beam for depositing coating material on the surface of a sheet of glass includes a plenum divided by a septum for separating different coating gases. Outlets for the gases are connected to an inlet to a mixing chamber for separating and redirecting the flow of the gases to thoroughly mix them into a coating material. A finger baffle having two sets of alternating finger elements extends across the width of the mixing chamber. Each finger element has one end closer to the plenum outlet than an opposite end. The plenum is surrounded by a cooling fluid duct and heating elements are provided for temperature control. Thermocouples generate signals representing desired temperatures and the heaters are controlled to maintain an optimum temperature for the gases as they flow from the plenum to the surface of the glass sheet which is located below an outlet from the mixing chamber.

566408

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