Doping epitaxial films by the molecular beam method

Details Doping epitaxial films by the molecular beam method Doping epitaxial films by the molecular beam method

H - Electricity

01

L

356/176

H01L 33/00 (2006.01) C30B 23/02 (2006.01) H01L 21/203 (2006.01)

Patent

CA 925629

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