Durable surface coating and coating process

C - Chemistry – Metallurgy – 23 – C

Patent

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C23C 14/34 (2006.01) C23C 14/00 (2006.01) C23C 14/06 (2006.01)

Patent

CA 2137288

2137288 9324316 PCTABS00028 Hard durable surface coatings comprising the elements Ti, Al, V, O, N and optionally Y and Mo are useful as surface coatings applied to machine tools and the like. The coatings are applied via three-electrode, cathodic sputtering methods wherein a biasing electrode (24) is maintained at a lesser polarity than the substrate-anode (20, 22) to aid in eliminating impurities from the coating.

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