Examination of physical properties of thin films

G - Physics – 01 – N

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G01N 21/84 (2006.01) G01N 21/65 (2006.01) G01N 21/21 (2006.01) G01N 21/55 (2006.01)

Patent

CA 2035686

- 8 - O.Z. 0050/41393 Abstract of the Disclosure: The physical properties of thin films can be examined with polarized light using a method which comprises directing polarized light at a layer system, exciting plasmon surface polaritons therein and thereby creating Raman-scattered light within the layer or layer system under examination, and imaging said light on a detector using an imaging system.

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