Examination of surface structures

Details Examination of surface structures Examination of surface structures

G - Physics

01

N

73/53

G01N 21/84 (2006.01) G01B 11/30 (2006.01) G01N 21/55 (2006.01)

Patent

CA 2012597

- 5 - O.Z. 0050/40662 Abstract of the Disclosure: A technique for examining surface structures which differ in respect of refractive index and/or height modulation of the surface comprises introducing these surface structures into a plasmon surface polariton field and scanning them by means of surface plasmon microscopy.

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