Examination of the physical properties of thin films

G - Physics – 01 – N

Patent

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G01N 21/84 (2006.01) G01N 21/55 (2006.01) G01N 21/21 (2006.01)

Patent

CA 2015920

- 10 - O.Z. 0050/40790 Abstract of the Disclosure: The physical properties of thin films can be examined with the aid of polarized light with which the film to be examined is irradiated while the reflected or transmitted light is deflected in the direction of an imaging system, the polarized light having the effect of exciting waveguide modes in the film to be examined.

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