Exhaust system for a vapor deposition chamber

Details Exhaust system for a vapor deposition chamber Exhaust system for a vapor deposition chamber

C - Chemistry, Metallurgy

03

B

32/23

C03B 37/018 (2006.01) B08B 15/04 (2006.01) C03B 37/014 (2006.01)

Patent

CA 1229222

- 9 - AN EXHAUST SYSTEM FOR A VAPOR DEPOSITION CHAMBER An exhaust system for a vapor-phase axial deposition system is comprised of the serial combination of an exhaust tube, an outlet pipe, a soot collection chamber and a discharge line. The exhaust tube has a constricted central portion and a flared intake with a gradually turned back end.

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