Fabrication method for field emission arrays

Details Fabrication method for field emission arrays Fabrication method for field emission arrays

H - Electricity

01

J

H01J 1/02 (2006.01) H01J 3/02 (2006.01) H01J 9/02 (2006.01)

Patent

CA 2070478

Abstract of the Disclosure A technique for forming field emitters for displays and vacuum microelectronic devices is described. The field emitters include a tip, a grid to control electron emission from the tip, and an electrode for focusing the electron emission. The method avoids simultaneous evaporation at vastly different angles and replaces simultaneous evaporation with successive evaporations followed by a noncritical lift-off.

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