Fabrication of devices involving lithographic procedures

Details Fabrication of devices involving lithographic procedures Fabrication of devices involving lithographic procedures

G - Physics

03

F

96/150

G03F 7/004 (2006.01) G03F 7/038 (2006.01) G03F 7/075 (2006.01)

Patent

CA 1293146

FABRICATION OF DEVICES INVOLVING LITHOGRAPHIC PROCEDURES Abstract Extremely useful compositions for delineation of materials utilized in device applications have been found. These compositions include a polymer having segments that are at least 10 monomer units long of a first entity and segments again at least 10 monomer units long of a second entity. The monomer units are chosen so that each segment type provides a specific chemical characteristic to the polymer.

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