Fabrication of electronically conducting polymeric patterns

Details Fabrication of electronically conducting polymeric patterns Fabrication of electronically conducting polymeric patterns

G - Physics

03

F

G03F 7/038 (2006.01)

Patent

CA 2070043

FABRICATION OF ELECTRONICALLY CONDUCTING POLYMERIC PATTERNS ABSTRACT OF THE DISCLOSURE Thin films of soluble polythiophenes and oligo- thiophenes undergo cross-linking and insolubilization upon irradiation with UV/visible light. Irradiation of thin polymer films through a photomask and subsequent develop- ment with solvent leaves a polymeric image of the mask. The resulting .pi.-conjugated polymeric pattern can be ren- dered electronically conducting by chemical oxidation. The electronic conductivity of these films is high and is similar to that found for oxidized, non-irradiated films. Furthermore, the conductivity can be regulated over eight orders of magnitude by controlled oxidation. Thus, the fabrication of electronically conducting, organic "wires" or "channels" using conventional semiconductor photolitho- graphic techniques can be achieved.

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