Fabrication of optical waveguides

C - Chemistry – Metallurgy – 03 – C

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26/197, 88/97

C03C 17/02 (2006.01) G02B 6/10 (2006.01)

Patent

CA 1281536

FABRICATION OF OPTICAL WAVEGUIDES ABSTRACT OF THE DISCLOSURE The guiding layers of optical waveguides are formed of arsenosilicate glass (ASG). By varying the arsenic content from 2 to 13 mole percent it is possible to vary the refractive index in the range 1.45 to 1.53. Pure silica or less heavily doped ASG can be used for the cladding layers. The ASG is preferably formed as the result of a heterogeneous reaction between silane and oxygen in the presence of arsine. Such a reaction can be carried out at temperatures down to 390°C, allowing the ASG to be used on substrates of group III-V compounds.

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