Ferroelectric capacitor and method for manufacturing thereof

Details Ferroelectric capacitor and method for manufacturing thereof Ferroelectric capacitor and method for manufacturing thereof

H - Electricity

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H01G 7/06 (2006.01) H01L 21/02 (2006.01) H01L 21/3205 (2006.01) H01L 21/768 (2006.01) H01L 21/314 (2006.01)

Patent

CA 2197491

A dielectric capacitor having excellent dielectric properties which comprises a silicon oxide layer (4), a lower electrode (12), a ferroelectric layer (8), and an upper electrode (15) formed on a silicon substrate (2). The lower electrode (12) is formed of palladium oxide, and so is the upper electrode (15). Palladium oxide prevents the permeation of oxygen through the dielectric layer (8), thus offering a dielectric capacitor having excellent dielectric properties.

L'invention porte sur un condensateur diélectrique présentant de très bonnes caractéristiques diélectriques comportant une couche d'oxyde de silicium (4), une électrode inférieure (12), une couche ferroélectrique (8) et une électrode supérieure (15) formée sur un substrat de silicium (2). L'électrode inférieure (12) est faite d'oxyde de palladium, de même que l'électrode supérieure (15). L'oxyde de palladium empêche la perméation de l'oxygène à travers la couche diélectrique (8), ce qui donne un condensateur diélectrique présentant d'excellentes propriétés diélectriques.

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