C - Chemistry – Metallurgy – 03 – C
Patent
C - Chemistry, Metallurgy
03
C
C03C 17/22 (2006.01) C03B 37/014 (2006.01) C03C 3/06 (2006.01) C03C 13/04 (2006.01)
Patent
CA 2463212
A method for manufacturing a fluorine-doped quartz glass article by sintering a porous glass preform moving in a heat zone in an atmosphere of a fluorine gas is disclosed, wherein a fluorine gas process is performed by setting a moving speed of the porous glass preform in the heat zone heated at 1000°C or more in order that L/V is 40 minutes or more, where L is the length (mm) of a heater, and V is the moving speed (mm/min). The temperature of the heat zone may be vitrification temperature. The fluorine gas process may be performed in the heat zone which is at 1000°C or more not to perform a vitrification process, and then the vitrification process maybe performed by increasing the temperature of the heat zone.
Abe Jun
Mantoku Nobuyasu
Riches Mckenzie & Herbert Llp
Shin-Etsu Chemical Co. Ltd.
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