C - Chemistry – Metallurgy – 23 – C
Patent
C - Chemistry, Metallurgy
23
C
117/103, 117/109
C23C 18/12 (2006.01) B05D 3/02 (2006.01) B05D 3/04 (2006.01) H01L 39/12 (2006.01) H01L 39/24 (2006.01)
Patent
CA 1311162
C-3986 FORMATION OF THIN FILM SUPERCONDUCTORS BY METALLO-ORGANIC DEPOSITION Abstract of the Disclosure Superconducting thin films of RE1Ba2Cu4Oz, where RE is a rare earth metal chosen from the group consisting of yttrium, ytterbium, and europium are produced in a non-vacuum environment using Metallo-Organic Deposition techniques. A solution comprising the neodecanoates of the rare earth metal, barium, and copper is formed and spun on a single crystal substrate of strontium titanate. The metallo-organic solutions are heated in an air environment at a temperature sufficient to decompose the neodecanoates, about 500°C, and then annealed to promote recrystallization and grain growth of the remaining metal oxides. The annealing step is preferably accomplished using rapid thermal annealing techniques wherein the material is uniformly and rapidly heated to an appropriate temperature for an amount of time ranging between about instantaneous to about 2 minutes. The resulting films of material exhibit superconductive characteristics at elevated temperatures.
578543
Dungan Dennis F.
Hamdi Aboud H.
Laugal Ruth C. O.
Mantese Joseph V.
Micheli Adolph L.
Dungan Dennis F.
General Motors Corporation
Gowling Lafleur Henderson Llp
Hamdi Aboud H.
Laugal Ruth C. O.
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