H - Electricity – 01 – C
Patent
H - Electricity
01
C
H01C 7/00 (2006.01) C23C 16/40 (2006.01) C23C 16/453 (2006.01) H01C 17/075 (2006.01) H01C 17/20 (2006.01) H01C 17/24 (2006.01) H01L 21/02 (2006.01) H05K 1/16 (2006.01) H05K 3/06 (2006.01)
Patent
CA 2267492
The invention is directed to thin film resistors which may be embedded in multi-layer printed circuit boards. The invention is also directed to structures for forming such thin film resistors and to methods for forming such structures, including the use of combustion chemical vapor deposition. The invention is also directed to chemical precursor solutions by which resistive materials can be deposited on a substrate by combustion chemical vapor deposition techniques.
Bottomley Stephen E.
Carpenter Richard W.
Hendrick Michelle
Hunt Andrew T.
Hwang Tzyy Jiuan
Gowling Lafleur Henderson Llp
Microcoating Technologies Inc.
Morton International Inc.
Rohm And Haas Chemicals Llc
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