Gas friction vacuum indicator with a gas friction sensor...

G - Physics – 01 – L

Patent

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G01L 21/24 (2006.01)

Patent

CA 2179750

A gas friction vacuum indicator has a gas friction sensor (2) that rotates around a fixed axis of rotation (reference number 20). The gas friction sensor is magnetically and contactlessly mounted within an evacuable measurement chamber. The magnetic field required for that purpose is rotationally symmetrical in relation to the axis of rotation (20) and may be regulated. The measurement chamber may spatially communicate with a vacuum chamber (4) whose vacuum is to be measured. In order to allow the measurement chamber axis to be placed in any desired position, the axis of rotation (20) is oriented away from the vertical (21), preferably horizontally. A measurement device (for example 22), whose output signal is used to correct the displayed pressure value, measures the inclination (24) of the axis of rotation (20) in relation to the vertical (21).

Un indicateur de vide à frottement de gaz comprend un capteur (2) de frottement de gaz tournant autour d'un axe de rotation fixe (numéro de référence 20). Le capteur de frottement de gaz est monté magnétiquement sans contact dans une chambre de mesure dans laquelle on peut faire le vide. Le champ magnétique requis à cet effet est symétrique en rotation par rapport à l'axe de rotation (20) et régulable. La chambre de mesure peut être mise en communication spatiale avec une chambre à vide (4) dont il faut mesurer le vide. Afin de pouvoir situer l'axe des chambres de mesure dans n'importe quelle position voulue, l'axe de rotation (20) a une orientation qui dévie de la verticale (21), de préférence une orientation horizontale. Un dispositif de mesure (par exemple 22) dont le signal de sortie sert à corriger la valeur de pression indiquée mesure l'inclinaison (24) de l'axe de rotation (20) par rapport à la verticale (21).

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