Gas mixtures for the vapor deposition of semiconductor material

H - Electricity – 01 – L

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31/193, 204/96.3

H01L 21/205 (2006.01)

Patent

CA 1279471

ABSTRACT Precursor gaseous mixtures from which wide and narrow band gap semiconductor alloy material may be deposited by a glow discharge process, said material characterized by improved photoconductivity and stability. There is also disclosed a method of fabricating a narrow band gap semiconductor that avoids differential depletion of the components of the precursor gaseous mixture.

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