Gyroscope packaging assembly

Details Gyroscope packaging assembly Gyroscope packaging assembly

G - Physics

01

C

G01C 19/56 (2006.01)

Patent

CA 2760961

Packaging techniques for planar resonator gyroscopes, such as disc resonator gyroscopes (DRGs) are disclosed. In one embodiment, a packaged resonator gyroscope comprises a carrier, a substrate layer mounted to the carrier, a baseplate coupled to the substrate to define a cavity between the substrate and the baseplate, and a resonator mounted to the baseplate and suspended in the cavity. Other embodiments may be described.

L'invention porte sur des techniques d'encapsulation pour gyroscopes à résonateur plan, tels que des gyroscopes à résonateur en disque. Dans un mode de réalisation, un gyroscope à résonateur encapsulé comprend un support, une couche de substrat montée sur le support, une plaque de base couplée au substrat pour définir une cavité entre le substrat et la plaque de base, et un résonateur monté sur la plaque de base et suspendu dans la cavité. D'autres modes de réalisation peuvent être décrits.

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