C - Chemistry – Metallurgy – 08 – F
Patent
C - Chemistry, Metallurgy
08
F
C08F 14/00 (2006.01) C08F 6/06 (2006.01) C08F 6/22 (2006.01)
Patent
CA 2382525
The invention relates to high purity fluoropolymers and processes for making such materials. These polymers are particularly suited for applications in the semiconductor industry. The process comprises removal of unstable polymer end groups by fluorination and removal of heavy metal impurities by extraction with an aqueous acid medium.
L'invention concerne des fluoropolymères de haute pureté et leurs procédés de fabrication. Ces polymères sont particulièrement adaptés à des applications dans l'industrie des semi-conducteurs. Le procédé consiste à éliminer les groupes terminaux polymériques instables par fluoration et élimination des impuretés métalliques lourdes par extraction avec un milieu acide aqueux.
Blong Thomas J.
Duchesne Denis
Kaulbach Ralph
Killich Albert
Loehr Gernot
3m Innovative Properties Company
Smart & Biggar
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