Humidity sensor and method of manufacturing the same

Details Humidity sensor and method of manufacturing the same Humidity sensor and method of manufacturing the same

G - Physics

01

N

G01N 27/00 (2006.01) C30B 25/00 (2006.01) G01N 27/12 (2006.01) G01N 27/22 (2006.01) G01N 37/00 (2006.01)

Patent

CA 2705653

humidity sensor comprising an insulating substrate, a moisture-sensitive layer, and at least a detection electrode contacting the moisture-sensitive layer, wherein the moisture-sensitive layer is a porous, photocatalytic metal oxide.

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