Improved silicon carbide particles, methods of fabrication,...

Details Improved silicon carbide particles, methods of fabrication,... Improved silicon carbide particles, methods of fabrication,...

C - Chemistry, Metallurgy

09

K

C09K 3/14 (2006.01) C04B 41/50 (2006.01)

Patent

CA 2700408

Improved silicon carbide particles, improved silicon carbide abrasive particles, and abrasive slurry compositions for use chemical mechanical planarization (CMP) processes, the particles can comprise nano-sized carbide particles, particularly silicon carbide particles having a surface chemistry similar to silica. Image

L'invention concerne des particules de carbure de silicium améliorées, des particules abrasives de carbure de silicium améliorées et des compositions de suspension épaisse abrasives pour une utilisation dans des processus d'aplanissement chimique et mécanique (CMP), les particules pouvant comprendre des particules de carbure nanométriques, notamment des particules de carbure de silicium présentant une composition chimique de surface similaire à la silice.

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