Inductively coupled plasma alignment apparatus and method

Details Inductively coupled plasma alignment apparatus and method Inductively coupled plasma alignment apparatus and method

H - Electricity

05

H

H05H 1/02 (2006.01) H05H 1/30 (2006.01)

Patent

CA 2548688

An inductively coupled plasma alignment apparatus comprising: a coil 10 for generating an inductively coupled plasma in a gas, the coil having a first axis 100; a torch 20 passing at least partially through the coil, the torch having a second axis 200; and an adjustment mechanism 80, 110 for adjusting the position of the torch with respect to the coil so as to alter the relative configuration of the first and second axes. The adjustment mechanism may adjust an angle and/or a distance between the second axis and the first axis. The second axis may be held substantially parallel to the first axis, while the adjustment mechanism adjusts a distance between the second axis and the first axis. The coil is preferably maintained substantially fixed in position with respect to a sampling aperture for sampling photons or ions from the plasma.

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