H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 21/68 (2006.01) C04B 35/524 (2006.01) H01L 21/00 (2006.01) H01L 21/3065 (2006.01) H01L 21/673 (2006.01) H01L 21/71 (2006.01)
Patent
CA 2140395
The present invention provides an instrument for production of semiconductor devices such as integrated circuits, which is composed substantially of a vitreous carbon derived from polycarbodiimide resin, and a process for producing an instrument for production of semiconductor device, which comprises molding a polycarbodiimide resin or a composition composed mainly of a polycarbodiimide resin, into the shape of an instrument for production of a semiconductor device and then carbonizing the molded material. The instrument for production of semiconductor is free from the problems of conventional instruments such as staining of the semiconductor devices and difficulty in processing. The instrument can be produced easily with high purity and low cost.
Ishimatsu Takeshi
Saito Kazuo
Nisshinbo Industries Inc.
Smart & Biggar
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