Integrated circuits having mixed layered superlattice...

H - Electricity – 01 – G

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H01G 7/06 (2006.01) C04B 35/622 (2006.01) C23C 18/12 (2006.01) H01G 13/00 (2006.01) H01L 21/316 (2006.01) H01L 21/77 (2006.01) H01L 27/01 (2006.01) H01L 29/92 (2006.01) H01L 21/314 (2006.01)

Patent

CA 2214833

Metal alkoxycarboxylate-based liquid precursor solutions are used to form electronic devices (100) that include mixed layered superlattice materials (112) of a type having discrete oxygen octahedral layers (124 and 128) collated with a superlattice-generator layer (116). The precursor solutions include a plurality of metal moieties in effective amounts for yielding the layered superlattice materials. These metal moieties are mixed to include an A/B portion capable of forming an A/B layer (124), a perovskite-like AB layer portion capable of forming a perovskite-like AB octahedral layer (128), and a superlattice-generator portion capable of forming the superlattice-generator layer (116). The precursors are deposited in liquid form upon a substrate and annealed to provide the layered superlattice materials.

La présente invention concerne des solutions précurseurs liquides à base d'alcoxycarboxylate métallique, utilisées pour former des dispositifs électroniques (100) composés de matériaux mixtes à super-réseau en couches (112) du type à couches octaèdres d'oxygène en phase discrète (124 et 128) interclassées avec une couche (116) génératrice de super-réseaux. Les solutions précurseurs comprennent plusieurs fragments métalliques en quantités calculées pour obtenir les matériaux à super-réseaux en couches. Ces fragments métalliques sont mélangés de manière à avoir une portion de A/B propre à constituer une couche A/B (124), une portion de couche AB de type perovskite capable de former une couche octaédre AB de type perovskite (128) et une partie génératrice de super-réseaux capable de former une couche génératrice de super-réseaux (116). Les précurseurs sont déposés sous forme liquide sur un substrat et recuits pour donner les matériaux à super-réseaux en couches.

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