Ion source

Details Ion source Ion source

H - Electricity

01

J

358/25

H01J 27/00 (2006.01) F02K 9/00 (2006.01)

Patent

CA 1295428

ABSTRACT An ion source has the typical chamber wherein ions are produced and caused to be propelled outwardly through at least a pair of grids which have a mutually- aligned respective plurality of apertures. Thus, there are the usual cathode, anode, magnet assembly, ionizable gas inlet and supporting power supplies as well as neutralizing means. First and second grids each have an integrally-formed peripheral marginal portion. A support element has a shape which matches and overlies the marginal portion of one grid, while a clamp has a shape which matches that of and overlies the other marginal portion. The support element and clamp are secured together. First and second mutually-aligned seats are successively spaced around the respective marginal portions. A plurality of insulators, each having of circular cross-section, are individually seated between the two different marginal portions in a manner to cause general alignment while enabling radial movement due to thermal expansion of the marginal portions relative to the support element and the clamp and each other.

570168

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