Ion source with multi-piece outer cathode

H - Electricity – 01 – J

Patent

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H01J 27/02 (2006.01) H01J 37/08 (2006.01)

Patent

CA 2606590

In certain example embodiments of this invention, there is provided an ion source including an anode (25) and a cathode (5) . In certain example embodiments, a multi-piece outer cathode (5b') is provided. The multi-piece outer cathode (5b') allows precision adjustments to be made, thereby permitting adjustment of the magnetic gap between the inner and outer cathodes. This allows improved performance to be realized, and/or prolonged operating life of certain components. This may also permit multiple types of gap adjustment to be performed with different sized outer cathode- end pieces. In certain example embodiments, cathode fabrication costs may also be reduced.

La présente invention concerne, dans certains exemples de modes de réalisation, une source d~ions comprenant une anode (25) et une cathode (5). Elle concerne dans certains exemples de modes de réalisation, une cathode externe à éléments multiples (5b'). La cathode externe à éléments multiples (5b~) permet d~effectuer des ajustements de précision, permettant ainsi l~ajustement de l~espace magnétique entre les cathodes internes et externes. Cela permet d~améliorer les performances, et/ou de prolonger la durée de vie de fonctionnement de certains composants. Cela peut aussi permettre d~effectuer de multiples ajustements de l~espace en utilisant des éléments d~extrémité de cathode externe de tailles différentes. Dans certains exemples de modes de réalisations, les coûts de fabrication de la cathode peuvent aussi être réduits.

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