H - Electricity – 05 – K
Patent
H - Electricity
05
K
96/226
H05K 3/06 (2006.01) G03F 7/004 (2006.01) G03F 7/038 (2006.01) H01B 3/44 (2006.01) H01L 23/14 (2006.01) H05K 1/00 (2006.01) H05K 3/46 (2006.01)
Patent
CA 1262070
ABSTRACT Linear fluorooligomers having at least two reactive end groups per polymer molecule are incorporated into radiation sensitive polymer systems which have improved continuous temperature resistance and low dielectric constant. The poly- mer systems can be applied as lacquers. Preferably perfluor- ated poly-ethers and perfluorated alkanes are used as starting compounds. The polymeric product is usable as a coating for the production of printed multi-layer wirings and economises on through-bores and additional copper intermediate layers. A further field of application exists in the field of integrated semiconductor circuits in VLSI-technology for the production of negative photo-resists.
488335
Budde Klaus
Koch Friedrich
Quella Ferdinand
Aktiengesellschaft Siemens
Budde Klaus
Fetherstonhaugh & Co.
Koch Friedrich
Quella Ferdinand
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