Jet plasma process and apparatus for deposition of coatings...

Details Jet plasma process and apparatus for deposition of coatings... Jet plasma process and apparatus for deposition of coatings...

C - Chemistry, Metallurgy

23

C

C23C 16/50 (2006.01) B05D 7/24 (2006.01) C23C 16/448 (2006.01) C23C 16/513 (2006.01) H01J 37/32 (2006.01)

Patent

CA 2298697

The present invention provides a method for the formation of an organic coating on a substrate. The method includes: providing a substrate in a vacuum; providing at least one vaporized organic material comprising at least one component from at least one source, wherein the vaporized organic material is capable of condensing in a vacuum of less than about 130 Pa; providing a plasma from at least one source other than the source of the vaporized organic material; directing the vaporized organic material and the plasma toward the substrate; and causing the vaporized organic material to condense and polymerize on the substrate in the presence of the plasma to form an organic coating. There is also disclosed a jet plasma apparatus for forming a coating on a substrate (75), comprising a cathode system (40), an anode system (60) and an oil delivery system (120) for providing vaporized organic material such that the organic material and the plasma (160) interact prior to, or upon contact with the substrate.

L'invention concerne un procédé pour la formation de revêtement organique sur un substrat, qui comprend les étapes suivantes : mise en place d'un substrat dans une atmosphère sous vide; fourniture depuis au moins une source, d'au moins un matériau organique vaporisé qui comprend au moins un élément, ledit matériau pouvant se condenser dans un vide de moins de 130 Pa environ; activation de plasma depuis au moins une source autre que la source précédente; orientation du matériau organique vaporisé et du plasma vers le substrat; et opération visant à obtenir la condensation et la polymérisation dudit matériau sur le substrat en présence du plasma, pour former un revêtement organique. L'invention concerne également un appareil à jet de plasma pour la formation de revêtement organique sur un substrat (75), qui comprend un système de cathode (40), un système d'anode (60) et un système de fourniture d'huile (120) assurant l'alimentation en matériau organique vaporisé de sorte que ledit matériau et le plasma (160) soient mis en interaction avant le contact avec le substrat ou au moment du contact avec celui-ci.

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