Layered capacitor device

Details Layered capacitor device Layered capacitor device

H - Electricity

01

G

H01G 4/30 (2006.01) H01G 4/38 (2006.01) H01L 23/522 (2006.01) H01L 27/08 (2006.01)

Patent

CA 2300704

A layered capacitor device with high capacitance per unit area is realised by alternating in the vertical direction first layers (FL1, FL2, FL3, FL4, FL5) and second layers (SL1, SL2, SL3, SL4). A first layer (FL2) consists of horizontally alternating electrically conducting tracks (T2,2; T2,3) and electrically insulating tracks, whereas a second layer consists of electrically insulating material, e.g. an oxide. In this way top-bottom capacitors (C TB) and side-wall capacitors (C SW) are constituted that are parallel coupled to form the layered capacitor device. In a preferred embodiment of the invention, this parallel coupling is realised by conductively interconnecting diagonally neighbouring electrically conducting tracks (T1,2; T2,3).

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