Magnetic roller gas gate employing transonic sweep gas flow

C - Chemistry – Metallurgy – 23 – C

Patent

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C23C 16/54 (2006.01)

Patent

CA 2158958

Disclosed herein is an improved gas gate (42) for interconnecting regions of differing gaseous composition and/or pressure. The gas gate includes a narrow, elongated passageway (92) through which substrate material (11) is adapted to move between said regions and inlet means (93) for introducing a flow of non-contaminating sweep gas into a central portion of said passageway. The gas gate is characterized in that the height of the passageway and the flow rate of the sweep gas therethrough provides for transonic flow of the sweep gas between the inlet means and at least one of the two interconnected regions, thereby effectively isolating one region, characterized by one composition and pressure, from another region, having a differing composition and/or pressure, by decreasing the mean-free-path length between collisions of diffusing species within the transonic flow region. The gas gate preferably includes a manifold at the juncture point where the gas inlet means and the passageway interconnect.

Vanne à gaz méliorée (42) permettant de relier des régions de compositions gazeuses et/ou de pressions distinctes. La vanne comprend un passage (92) mince et étroit dans lequel une substance (11) est conçue pour se déplacer entre les deux régions et une entrée (93) permettant d'introduire un gaz de lavage non contaminant dans la partie centrale du passage. La vanne se distingue par la hauteur du passage et le débit du gaz de lavage, qui permettent à ce dernier de se déplacer à un débit transsonique entre l'entrée et au moins une des deux régions reliées, ce qui par conséquent isole efficacement une région, caractérisée par une composition et une pression distinctes, d'une autre dont la composition et/ou la pression est différente en diminuant la longueur du libre parcours moyen entre des collisions de la variété diffusante à l'intérieur de la région de débit transsonique. La vanne comprend de préférence un collecteur situé sur le point d'intersection entre l'entrée de gaz et le passage.

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