Metallo-organic precursors to titanium nitride

C - Chemistry – Metallurgy – 07 – F

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C07F 7/28 (2006.01) B05D 7/24 (2006.01) C01B 21/076 (2006.01) C03C 17/22 (2006.01) C07F 7/00 (2006.01) C23C 16/18 (2006.01) C23C 16/34 (2006.01)

Patent

CA 2087549

Image Consommation et Consumer and Affaires commerciales Canada Corporate Affairs Canada Bureau des brevets Patent Office Ottawa, Canada K1A0C9 (21) (A1) 2,087,549 Image (22) 1993/01/19 (43) 1993/07/25 (51) INTL.CL.5 C07F-007/28; C23C-016/18; B05D-007/24 (19)(CA) APPLICATION FOR CANADIAN PATENT (12) (54) Metallo-Organic Precursors to Titanium Nitride (72) Winter, Charles H. - U.S.A. ; Lewkebandara, Tilak S. - U.S.A. ; Proscia, James W. - U.S.A. ; Sheridan, Philip H. - U.S.A. ; (73) Ford Motor Company of Canada, Limited - Canada ; (30) (US) 07,825,235 1992/01/24 (57) 55 Claims Notice: This application is as filed and may therefore contain an incomplete specification. Image CCA3254(10-92)41 7530-21-936-3254

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