Method and apparatus for detecting wavelength of laser beam

Details Method and apparatus for detecting wavelength of laser beam Method and apparatus for detecting wavelength of laser beam

G - Physics

01

J

G01J 3/457 (2006.01) G01J 9/02 (2006.01) G01J 3/26 (2006.01)

Patent

CA 2043582

ABSTRACT A measured laser oscillation light is introduced into an etalon, a concentric circular interference stripe derived from the etalon is irradiated on one dimensional photodetector array, and a diameter of said interference stripe is measured to measure a wavelength. By an arrangement wherein the reference laser oscillation light and the measured laser oscillation light are introduced into the etalon as described above, extremely high accurate wavelength measurement can be made without being affected by a positional deviation of an optical system and precision.

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