H - Electricity – 01 – L
Patent
H - Electricity
01
L
356/182, 356/187
H01L 21/205 (2006.01) C23C 16/517 (2006.01)
Patent
CA 1279411
ABSTRACT OF THE DISCLOSURE The present invention is directed to a method for forming a thin film by the use of a glow discharge plasma which comprises generating a magnetic field in a direction crossing an electric field for discharge at right angles and fluctuating the magnetic field; and the present invention is also directed to an apparatus for practicing the above method, which apparatus is composed of a reaction vessel, a means for permitting the pressure reduction in the reaction vessel and the feed of reaction gases thereto, electrodes for discharge disposed face to face in the reaction vessel, a power source from which a voltage for glow discharge is fed to the electrodes for discharge, a coil, surrounding the electrodes for discharge, for generating a magnetic field in a direction crossing at right angles an electric field generated between the electrodes for discharge, and an AC power source from which a current for magnetic field generation is fed to the coil, whereby the thin film is formed on a base plate supported outside the range of the discharge electric field and in parallel with the direction of the electric field.
536654
Fujiyama Hiroshi
Gengo Tadashi
Ichinari Joji
Kaneko Shozo
Kayumi Yoshio
Fetherstonhaugh & Co.
Fujiyama Hiroshi
Gengo Tadashi
Ichinari Joji
Kaneko Shozo
LandOfFree
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