H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 21/00 (2006.01)
Patent
CA 2583838
The invention relates to a method for treating substrates, which method comprises the following steps: producing a liquid film on a local surface area of the substrate to be treated using a nozzle unit which comprises at least one elongate nozzle arrangement and also using an ultrasound or megasound transducer arrangement arranged next to it; contacting at least a part of the ultrasound transducer arrangement with the liquid film; and introducing ultrasound into the liquid film produced using the ultrasound transducer arrangement.
L'invention concerne un procédé pour traiter des substrats comprenant les étapes suivantes : formation d'une pellicule liquide sur une surface locale du substrat à traiter par une unité à buses comprenant au moins un dispositif à buses allongé et un dispositif transformateur d'ultrasons ou de mégasons adjacent à celui-ci ; mise en contact d'au moins une partie du dispositif transformateur d'ultrasons avec la pellicule liquide ; et introduction d'ultrasons dans la pellicule liquide, ainsi formée, au moyen du dispositif transformateur d'ultrasons.
Branz Karsten
Dress Peter
Gairing Thomas
Sowa Michael
Hamatech Ape Gmbh & Co. Kg
Robic
LandOfFree
Method and device for treating substrates and corresponding... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and device for treating substrates and corresponding..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and device for treating substrates and corresponding... will most certainly appreciate the feedback.
Profile ID: LFCA-PAI-O-2060417