G - Physics – 01 – Q
Patent
G - Physics
01
Q
G01Q 30/02 (2010.01) H01J 49/26 (2006.01)
Patent
CA 2493212
The invention relates to a combined method in which a high-resolution image of a sample surface is recorded by means of scanning force microscopy and the locally high-resolution, chemical nature (which is correlated with this) of the sample surface is measured by means of mass spectroscopy. The surface is chemically analyzed on the basis of laser desorption of a restricted surface area. For this purpose, the surface is illuminated in a pulsed form at each point of interest using the optical near-field principle. The optical near-field principle guarantees analysis with a position resolution which is not diffraction-limited. A hollow tip of the measurement probe that is used allows unambiguous association between the chemical analysis and a selected surface area. The highly symmetrical arrangement allows good transmission of the molecular ions that are produced.
L'invention concerne un procédé combiné, selon lequel on enregistre une représentation haute résolution d'une surface d'échantillon par microscopie à forces atomiques et une nature chimique à haute résolution de la surface d'échantillon de la spectrocopie de masse. L'analyse chimique de la surface a lieu après la désorption laser d'une zone superficielle limitée. A cet effet, la surface est éclairée à chaque emplacement concerné par impulsions d'après le principe de champ proche optique. Le principe de champ proche optique garantit une analyse avec une résolution locale à diffraction limitée. Une pointe creuse de la sonde de mesure utilisée permet une affectation univoque de l'analyse chimique zu une zone superficielle sélectionnée. La disposition hautement symétrique permet une transmission élevée des ions moléculaires générés.
Amrein Matthias
Dreisewerd Klaus
Knebel Detlef
Gowling Lafleur Henderson Llp
Jpk Instruments Ag
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