Method for preparing thin unsupported films of silicon nitride

Details Method for preparing thin unsupported films of silicon nitride Method for preparing thin unsupported films of silicon nitride

H - Electricity

01

G

204/96.07

H01G 4/08 (2006.01) C23C 14/00 (2006.01) C23F 1/00 (2006.01)

Patent

CA 927776

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