Method of chemically polishing both sides of an sc- cut...

Details Method of chemically polishing both sides of an sc- cut... Method of chemically polishing both sides of an sc- cut...

C - Chemistry, Metallurgy

30

B

149/9

C30B 33/00 (2006.01)

Patent

CA 1168134

ABSTRACT Both sides of an SC-cut quartz crystal plate whose theta (.theta.) angle is between about -33° and -36° and whose phi (?) angle is between about 20° and 26° are chemically polished by lapping the quartz plate with an abrasive and etching the lapped quartz plate in a 25 to 30 percent solution of hydro- fluoric acid (HF) in water, the etching being carried out until surface rough- nesses of between 0.05 µm and 0.04 µm are obtained.

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