Method of depositing textured tin oxide

Details Method of depositing textured tin oxide Method of depositing textured tin oxide

C - Chemistry, Metallurgy

03

C

117/85

C03C 17/34 (2006.01) C23C 16/40 (2006.01) H01L 31/0236 (2006.01) H01L 31/18 (2006.01)

Patent

CA 1333461

A method of forming a textured layer of tin oxide on a vit- reous substrate in which the thickness and degree of texture of the layer can be controlled independently of one another. The method comprises the steps of depositing a first film of tin oxide on the substrate by chemical vapor deposition from a first reactant mixture of tin chloride, water, and an alcohol and depositing a second film of tin oxide on the first tin oxide film by chemical vapor deposition from a second reactant mixture of tin chloride and water. Where the substrate is ordinary soda lime glass, it preferably is first coated with a film of silicon dioxide. The method permits deposition of substantially uniform layers of tin oxide in a continuous deposition process.

575916

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