Method of depositing tin oxide and titanium oxide coatings...

Details Method of depositing tin oxide and titanium oxide coatings... Method of depositing tin oxide and titanium oxide coatings...

C - Chemistry, Metallurgy

03

C

C03C 17/245 (2006.01) C23C 16/40 (2006.01) C23C 16/455 (2006.01)

Patent

CA 2262504

A chemical vapour deposition process for laying down a tin or titanium oxide coating on hot flat glass through the use of an organic oxygen containing compound and the corresponding metal tetrachloride. The organic oxygen compound is preferably an ester having an alkyl group with a .beta. hydrogen in order to obtain a high deposition rate. Because of the high deposition rates attainable, typically at least 130 .ANG./second, the process is suitable for depositing coatings of substantial thickness on a moving ribbon of float glass during the glass production process.

Procédé de dépôt de vapeur chimique servant à déposer un revêtement d'oxyde d'étain ou d'oxyde de titane sur une plaque de verre chaud par l'intermédiaire d'un composé contenant de l'oxygène organique et le tétrachlorure de métal correspondant. Ce composé d'oxygène organique est, de préférence, un ester possédant un groupe alkyle comportant un beta hydrogène, de manière à atteindre une vitesse de dépôt élevée. Etant donné les vitesses de dépôt qu'on peut atteindre, à savoir au moins 130 ANGSTROM à la seconde, ce procédé peut être mis en application avantageusement afin d'effectuer des dépôts de revêtements sensiblement épais sur un ruban mobile de verre flotté pendant le processus de fabrication du verre.

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