C - Chemistry – Metallurgy – 03 – C
Patent
C - Chemistry, Metallurgy
03
C
C03C 17/245 (2006.01) C03C 17/34 (2006.01) H01L 31/0224 (2006.01)
Patent
CA 2633717
A method of making a coated article including a transparent conductive oxide (TCO) film supported by a glass substrate is provided. Initially, an amorphous metal oxide film is sputter-deposited onto a glass substrate, either directly or indirectly. The glass substrate with the amorphous film and a semiconductor film thereon is then thermally treated at high temperature(s). The thermal treating causes the amorphous film to be transformed into a crystalline transparent conductive oxide (TCO) film. The heat used in the thermal treating causes the amorphous film to turn into a crystalline film, causes the visible transmission of the film to increase, and/or causes the film to become electrically conductive.
La présente invention concerne un procédé de fabrication d'un article revêtu comprenant un film d'oxyde conducteur transparent (TCO) supporté par un substrat de verre. Au départ, un film d'oxyde métallique amorphe est déposé par pulvérisation cathodique sur un substrat de verre, soit directement, soit indirectement. Le substrat de verre avec le film amorphe et un film semi-conducteur sur celui-ci est ensuite thermiquement traité à haute(s) température(s). Le traitement thermique a pour effet de transformer le film amorphe en un film d'oxyde conducteur transparent (TCO). La chaleur utilisée dans le traitement thermique a pour effet de transformer le film amorphe en un film cristallin, d'accroître la transmission de la lumière visible du film et/ou de rendre ce film électriquement conducteur.
Guardian Industries Corp.
Macpherson Leslie & Tyerman Llp
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