H - Electricity – 01 – L
Patent
H - Electricity
01
L
345/14
H01L 31/08 (2006.01)
Patent
CA 1173546
PHB 32578 24 28.8.80 ABSTRACT: Method of manufacturing an infra-red detector device. In the manufacture of an infra-red detector de- vice at least a portion of a surface of a body (4) of mercury cadmium telluride is subjected to a conversion treatment (for example, using electrolytic anodising or a chemical oxidizing solution such as H202) to produce a surface layer (7), after which a heating step is perform- ed. The invention provides a simple and reproducible pro- cess for forming in the body a p-n junction (10) of suffi- ciently good quality for such a detector which can be of planar form so facilitating the formation of detector ele- ment arrays in the body and the provision of contacts to the detector element(s). The layer (7) produced by the conversion treatment comprises a sufficient quantity of an element (apparently mercury) derived from said body (4) as to act subsequently as a source for re-introducing said element into said body (4). This constituent element of said body (4) when present in an excess concentration in the material of said body (4) yields the characteris- tics of n-type material at the operating temperature of the detector device (for example room temperature OR 77°K). The surface layer (7) is heated in said heating step to a temperature in excess of 100°C (for example in the range of 125°C to 270°C for a period in the range of 100 se- conds to 40 hours) to introduce a quantity of said ele- ment from the surface layer (7) into an underlying region (9) of the body (4) so as to form the p-n junction (10). Preferably the surface layer (7) is produced on mercury cadmium telluride which has at said device operating temperature the characteristics of p-type material. How- ever it is also possible for at least a surface portion to be n-type and to be converted to p-type material by said heating step which also forms the n-type region (9) from the layer (7).
359520
Blackman Maurice V.
Jenner Michael D.
N.v. Philips Gloeilampenfabrieken
Van Steinburg C.e.
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