C - Chemistry – Metallurgy – 03 – C
Patent
C - Chemistry, Metallurgy
03
C
C03C 17/02 (2006.01) C03C 17/25 (2006.01) C04B 37/00 (2006.01) C04B 37/02 (2006.01) C04B 41/86 (2006.01) G01L 1/22 (2006.01) G01L 9/00 (2006.01) G01L 9/12 (2006.01) H01L 21/316 (2006.01)
Patent
CA 2082021
To avoid any deterioration of the surface properties of objects of ceramic, glass, or a single-crystal insulat- ing material which are subjected to a vacuum temperature process, a thin layer of a spin-on glass solution with a silicon-dioxide equivalent of not more than 10% is applied to the objects by spinning or spraying prior to the vacuum temperature process. This is particularly important to avoid the strong moisture dependence of capac- itive or resistive pressure sensors having a substrate and a diaphragm to be joined together, forming a chamber sealed at least at the edge. The diaphragm is covered with a layer of silicon carbide, niobium, or tantalum serving as one capacitor electrode, or the surface portion of the diaphragm which will lie within the chamber is coated with at least one strain gage; the portion of the substrate surface which will lie within the chamber is coated with at least one additional capacitor elec- trode or, in the case of the resistive pressure sensor, not coated therewith; over the entire surface portion of the substrate and diaphragm thus coated, a thin layer of the spin-on glass solution is applied and dried; contact is made to the capacitor electrodes or strain gages through the substrate and/or diaphragm, and sub- strate and diaphragm are brazed together by means of a ring-shaped part of active brazing material, which also serves as a spacer, or by means of a sufficient amount of active brazing paste.
Drewes Ulfert
Hegner Frank
Endress U. Hauser Gmbh U. Co.
Fetherstonhaugh & Co.
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