Micro-machined mirror device

G - Physics – 02 – B

Patent

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Details

G02B 7/182 (2006.01) G02B 26/08 (2006.01)

Patent

CA 2378736

A micro machined mirror assembly is provided that includes a micro machined top cap (205), mirror (210), and bottom cap (215) mounted onto a ceramic substrate. The micro machined mirror is resiliently supported by a pair of T-shaped hinges and includes travel stops that limit motion of the mirror in the x-, y-, and z-directions. The top and bottom micro machined caps also include travel stops that limit motion of the mirror in the z-direction.

L'invention concerne un ensemble à miroir micro-usiné qui comprend un couvercle supérieur micro-usiné (205), un miroir (210) et un couvercle inférieur (215) monté sur un substrat céramique. Le miroir micro-usiné repose de façon souple sur une paire de charnières en T et comprend de butoirs qui limitent les déplacements du miroir le long des axes X, Y et Z. Les couvercles micro-usinés supérieur et inférieur comprennent également des butoirs qui limitent le déplacement du miroir le long de l'axe z.

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