Micromanipulator including piezoelectric benders

Details Micromanipulator including piezoelectric benders Micromanipulator including piezoelectric benders

B - Operations, Transporting

25

J

B25J 7/00 (2006.01) H01L 41/09 (2006.01) H02N 2/02 (2006.01)

Patent

CA 2469041

The invention relates to a micromanipulator, which is intended for the positioning/localization of an operating instrument (1) coupled therewith, by controlling its movement in a single- or multi-axial system of coordinates, such as in the direction of an x-, y- and/or z-axis, by means of electrical actuators (2) present in the micromanipulator. Especially for providing a substantially elongated structure for the micromanipulator, one or more actuators (2; 2~) enabling the positioning/localization of the operating instruments (1), for providing at least one of its desired directions of motion, are implemented in the way of a piezoelectric bender (2~a).

L'invention concerne un micromanipulateur permettant de positionner/localiser un instrument (1) couplé à ce micromanipulateur. On contrôle le mouvement de l'instrument dans un système mono-axial ou multi-axial de coordonnées (par exemple, direction d'un axe x-, y- et/ou z-) au moyen d'actionneurs électriques (2) dont est équipé le micromanipulateur. En particulier, pour établir une structure sensiblement allongée du micromanipulateur, on installe un ou plusieurs actionneurs (2, 2') en configuration de flexeur piézoélectrique (2'a) permettant de positionner/localiser l'instrument (1), selon une manipulation effectuée au moins dans l'une des directions de mouvement souhaitées.

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