Microwave plasma generating apparatus and process for the...

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H05H 1/18 (2006.01) B23P 5/00 (2006.01) C23C 16/27 (2006.01) C23C 16/511 (2006.01) H01J 37/32 (2006.01) H05H 1/46 (2006.01)

Patent

CA 2026175

ABSTRACT OF THE DISCLOSURE MICROWAVE PLASMA GENERATING APPARATUS AND PROCESS FOR THE PREPARATION OF DIAMOND THIN FILM UTILIZING SAME A microwave plasma generating apparatus for generating plasma by radiating microwave into a space in which electric discharge takes place contains a plurality of microwave radiating means for radiating a plurality of microwaves having different directions of electric fields from each other. This microwave plasma generating apparatus can produce a diamond thin film by exciting a carbon source gas supplied into the space and bringing the excited gas into contact with a substrate to be formed thereon with the diamond thin film, the substrate being disposed in the space in which the electric discharge is performed. This apparatus can produce a large volume of plasma in a stable fashion and, as a result, provide a diamond thin film in a large area as a whole.

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