H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 21/64 (2006.01) B81B 3/00 (2006.01) G02B 5/08 (2006.01) G02B 26/08 (2006.01) H01H 1/00 (2006.01)
Patent
CA 2149952
A method of forming of a monomolecular layer (monolayer) (19) for surfaces of contacting elements (17) of a micro-mechanical device (10). The method includes providing a coordinating substance on the surface of one of the contacting elements (13), then depositing a precursor substance (51) for formation of the monolayer (19). The coordinating substance (33) and the precursor substance (51) are chosen based on molecular recognition chemistry.
Gnade Bruce E.
Wallace Robert M.
Webb Douglas A.
Kirby Eades Gale Baker
Texas Instruments Incorporated
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