Nozzle-injector for arc plasma deposition apparatus

Details Nozzle-injector for arc plasma deposition apparatus Nozzle-injector for arc plasma deposition apparatus

B - Operations, Transporting

05

B

B05B 7/22 (2006.01) C23C 4/12 (2006.01) C23C 16/513 (2006.01) H05H 1/34 (2006.01) B05B 12/12 (2006.01)

Patent

CA 2238158

A nozzle-injector was designed and fabricated for plasma deposition of thin-film coatings using a wall-stabilized arc torch as the plasma generator. The design of the nozzle-injector controls the injection, ionization, and reaction of the reagents, and these functions, in turn, determine the coating deposition rate, coating area, coating composition, and coating quality.

L'invention porte sur un injecteur conçu et fabriqué pour réaliser le dépôt en phase vapeur activé par plasma de minces couches de revêtement au moyen d'un chalumeau à arc à paroi stabilisée qui permet de générer du plasma. Ce modèle d'injecteur permet de contrôler l'injection, l'ionisation et la réaction des réactifs et ces fonctions, quant à elles, permettent de déterminer le taux de dépôt du revêtement, l'aire d'application du revêtement, ainsi que sa composition et sa qualité.

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